SPR700 1um - NanoLabStaff/nanolab GitHub Wiki

~1um SPR700 Protocol

by Jonas M. Ribe

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1. Spin coat SPR700

    4000rpm for 31s
    Ramp: 4000rpm/s for 1s
   

2. Soft bake

    95°C for 60s (right hot plate in litho)
   

3. Exposure (MA-6)

    ~100mJ/cm²
   

4. Post-exposure bake

    115°C for 60s
   

5. Develop

    MF-26A 40-60s (gently stirring)
    Rinse for 30s DI
    Dry w. N2
   

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100mJ SPR700 cross section giving a ~80° positive profile