SPR700 - NanoLabStaff/nanolab GitHub Wiki

Spin Parameters

Coater: Polos Spin 150

Spin speed (rpm) Thickness (μm)
2000 1.30
4000 0.96
6000 0.79
  • Spin time 30s
  • Ramp: 1s.
  • Decreasing the ramp, increases the thickness: 6000rpm w. 1000rpm/s ramp --> 890nm thickness.
  • Thickness measured after soft bake using reflectometer.
  • A 6000rpm sample was measured after development using profilometer for comparison: 920nm.

Very uniform coating, edge bead negligible for most purposes.

Datasheet

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