S1813 1p4um - NanoLabStaff/nanolab GitHub Wiki

~1.4μm S1813 Protocol

by Jonas M. Ribe

  1. Spin coat S1813

     4000rpm for 31s
 Ramp: 4000rpm/s for 1s

  2. Soft bake

     115°C for 60s

  3. Exposure

     ~40mJ/cm² (?)

  4. Develop

     MF-26A 30s
 Last 10s stirring
 Rinse for 30s DI
 Dry w. N2

  5. Hard bake (optional)

Discuss this protocol!

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