S1813 - NanoLabStaff/nanolab GitHub Wiki
Coater: Polos Spin 150
| Spin speed (rpm) | Thickness (μm) |
|---|---|
| 2000 | 1.96 |
| 3000 | 1.69 |
| 4000 | 1.37 |
| 5000 | 1.21 |
| 6000 | 0.12 |
- Spin time 30s
- Ramp: 1s.
- Thickness measured after soft bake using reflectometer (robust mode, FTT gives slightly lower values).
- Lamp intensity warning on Filmetrics reflectometer in litho finger,but values were in agreement with the one in the student lab
Very uniform coating for >3000rpm.
S1800 spin curve from datasheet:
S1800 dose curve from datasheet:
- n1 = 1.5935
- n2 = 1.8854e6
- n3 = 4.1211e10
| Wavelength [nm] | Refractive index |
|---|---|
| 435.8 | 1.6929 |
| 632.8 | 1.6406 |
| Wavelength | A (μm^-1) | B (μm^-1) |
|---|---|---|
| 365nm | 1.07 | 0.31 |
| 436nm | 0.61 | 0.08 |