SU 8 50um - NanoLabStaff/nanolab GitHub Wiki

50μm SU-8 Process

by Jonas M. Ribe

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1. Spin coat SU-8 3050

    Init: 500rpm for 10s
    Final: 2500rpm for 40s
    Ramp: 250rpm/s (+10s)
   

2. Soft bake

    15min at 95°C
    Cool on aluminum block
   

3. Exposure (MA-6)

    ~500mJ/cm²
   

4. Post-exposure bake

    1min at 65°C
    5min at 95°C
    Cool on aluminum block
   

5. Develop

    ~3min in mrDev 600 (under agitation)
    Rinse in fresh developer
    Rinse in IPA
    Dry w. N2
   

6. Hard bake (optional)

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