SU 8 5 - NanoLabStaff/nanolab GitHub Wiki
Coater: Polos Spin 150
| Spin speed [rpm] | Thickness [μm] | Ramp [s] |
|---|---|---|
| 6000 | 4.8 | 12 |
| 3000 | 12.7 | 6 |
- No spread cycle as spin coater does not allow for different ramp accelerations in single run
- Spin cycle: ramp to final speed using 500rpm/s acceleration
From datasheet:
- Spread Cycle: Ramp to 500 rpm at 100 rpm/second acceleration. This will take 5 seconds.
- Spin Cycle: Ramp to final spin speed at an acceleration of 300 rpm/second and hold for a total of 30 seconds.
| Spin speed (rpm) | Thickness (μm) |
|---|---|
| 3000 | 5 |
| 2000 | 7 |
| 1000 | 15 |
From datasheet:
| Thickness (μm) | Pre-bake @ 65°C | Soft bake @ 95°C |
|---|---|---|
| 5 | 1 | 3 |
| 7 | 2 | 5 |
| 15 | 2 | 5 |
From datasheet:
| Thickness (μm) | Post-exposure bake @ 65°C | Post-exposure bake @ 95°C |
|---|---|---|
| 5 | 1 | 1 |
| 7 | 1 | 1 |
| 15 | 1 | 2 |
From datasheet:
| Thickness (μm) | Development (min) |
|---|---|
| 1.5 | 1 |
| 2 | 1 |
| 5 | 3 |