SU 8 2100 - NanoLabStaff/nanolab GitHub Wiki

Coater: Polos Spin 150

Spin speed [rpm]	Thickness [μm]	Ramp [s]
6000	45	24

• No spread cycle as spin coater does not allow for different ramp accelerations in single run
• Spin cycle: ramp to final speed using 250rpm/s acceleration

From datasheet:

Datasheet recommends two accelerations, but this is not possible on our setup:

• Spread Cycle: Spin at 500 rpm for 5-10s with a ramp of 100 rpm/second.
• Spin Cycle: Spin at 2000 rpm for 30s with a ramp of 300 rpm/second.

Spin speed [rpm]	Thickness [μm]
3000	~100
2000	~180
1000	~270

From datasheet:

Thickness [μm]	Pre-bake @ 65°C	Soft bake @ 95°C
100-150	5	20-30
160-225	5-7	30-45
230-270	7	45-60
280-550	7-10	60-120

From datasheet:

Thickness [μm]	Energy [mJ/cm²]
100-150	240-260
160-225	260-350
230-270	350-270
280-550	370-600

From datasheet:

Thickness [μm]	Post-exposure bake @ 65°C	Post-exposure bake @ 95°C
100-150	5	10-12
160-225	5	12-15
230-270	5	15-20
280-550	5	20-30

From datasheet:

Thickness [μm]	Development [min]
100-150	10-15
160-225	15-17
230-270	17-20
280-550	20-30

From datasheet:

n1	n2	n3
1.566	0.00796	0.00014

Wavelength [nm]	Refractive index
435.8	1.6118
632.8	1.5868

Calculated for our reflectometer using Wolfram alpha:

• http://www.wolframalpha.com/input/?i=1.566%2B0.00796%2F%284.358e-1^2%29%2B0.00014%2F%284.358e-1^4%29
• http://www.wolframalpha.com/input/?i=1.566%2B0.00796%2F%286.328e-1^2%29%2B0.00014%2F%286.328e-1^4%29

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Datasheet