SU 8 2 - NanoLabStaff/nanolab GitHub Wiki
Coater: Polos Spin 150
- No spread cycle as spin coater does not allow for different ramp accelerations in single run
- Spin cycle: ramp to final speed using 300rpm/s acceleration
| Spin speed [rpm] | Thickness [μm] | Ramp [s] |
|---|---|---|
| 2000 | 2.0 | 7 |
| 4000 | 1.17 | 14 |
| 6000 | 0.97 | 20 |
| 8000 | 0.88 | 27 |
| 10000 | 0.85 | 34 |
All spin speeds gave uniform results expect 2000rpm, which had a relatively large edge bead
From datasheet:
| Thickness (μm) | Pre-bake @ 65°C | Soft bake @ 95°C |
|---|---|---|
| 1.5 | 1 | 1 |
| 2 | 1 | 3 |
| 5 | 1 | 3 |
From datasheet:
| Thickness (μm) | Post-exposure bake @ 65°C | Post-exposure bake @ 95°C |
|---|---|---|
| 1.5 | 1 | 1 |
| 2 | 1 | 1 |
| 5 | 1 | 1 |
From datasheet:
| Thickness (μm) | Development (min) |
|---|---|
| 1.5 | 1 |
| 2 | 1 |
| 5 | 1 |