Dilution of AMONIL MMS4 to AMONIL MMS10 - NanoLabStaff/nanolab GitHub Wiki

by Vilde Sørdal ([email protected])

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1. Mix AMONIL MMS4 with ethylene glycol monoisopropyl ether in a dark bottle, inside a fume hood.

    AMONIL MMS4: 0.5 g
    Ethylene glycol monoisopropyl ether: 0.6 g
   

2. Let stand for 24 hours before use.

    Time: 24 h.
   

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The diluted resist must be used the following day. Do NOT use after two days or more, as it gets bad and will contaminate the SCIL stamp.

This recipe makes 1.2 g of AMONIL MMS10. This is enough for 2-3 imprints on 2" wafers. If you want another amount, you can calculate from these parameters:

AMONIL MMS4 consists of 1 part AMONIL and 4 parts solvent. AMONIL MMS10 consists of 1 part AMONIL and 10 parts solvent. Therefore, for diluting MMS4 to correspond to MMS10, 1 part of MMS4 must be mixed with 1.2 parts of solvent (ethylene glycol monoisopropyl ether (CAS number 109-59-1)).

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