AZ5214E lift off with MLA - NanoLabStaff/nanolab GitHub Wiki

Hi all, Plz find below receipt for lift-off process using MLA.

  1. Spin coat AZ5214E 4000rpm for 45s Ramp: 4000rpm/s for 1s.
  2. Pre-bake at 110°C for 50s (temp shown 108C using the right big hotplate of the three ones).
  3. MLA exposure with dose 20mJ/cm2
  4. Image-reversal bake 120°C for 120s (temp shown 118C using the right big hotplate of the three ones)
  5. Flood exposure 200mJ/cm2
  6. Develop AZ726 MIF ~60s Rinse in DI Dry with N2(g)

This gives me clean and easy metal lift-off of 100nm Al for around 1 to 2 um resolution.