AMONIL resist strip - NanoLabStaff/nanolab GitHub Wiki

by Nimi Gopalakrishnan ([email protected])

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1. Step

    Piranha etch: H2SO4: H202- 3:1: 30min, add H2SO4 to H2O2 slowly
   

2. Step

   HF etch: 2% HF solution: 2min
   

3. Step

   Repeat Piranha if required.

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Discuss this protocol!