AMONIL 180nm - NanoLabStaff/nanolab GitHub Wiki

by Nimi Gopalakrishnan ([email protected])

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1. Spin coat AMONIL(180nm)

    5000rpm for 30s
    Ramp: 4000rpm/s   
   

2. Soft bake

    No bake
   

3. Exposure

    Features: dots/lines/areas
    
    Dose: 5J/cm^2
   

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