950K PMMA A4.5 Spin curve for custom resist - NanoLabStaff/nanolab GitHub Wiki
950K PMMA A4.5 Spin curve for custom resist
by Simen Martinussen ([email protected])
Final spin time: 45s Acceleration: 1000 RPM/s
| Spin speed [RPM] | Thickness [nm] |
|---|---|
| 1000 | 490 |
| 2000 | 345 |
| 3000 | 285 |
| 4000 | 251 |
| 5000 | 230 |
| 6000 | 219 |
| 7000 | 212 |
Spin speed of 7000 RPM is probably not recommended for the sake of the spin coater.
