10Zone Calibration Generator - bradmartin333/XferSuite GitHub Wiki

Preparation

  1. Unload any current Z or ZC calibrations
  2. Home All stages
  3. Load highest mag objective available
  4. Open XferSuite Settings
  5. Click Advanced Tools
  6. Click 10Zone Calibration Generator
  7. Click Open
  8. Update the stage ranges and axes numbers in the window to match the tool's configuration

Saving Positions

  1. Go to the NW corner of the chuck and find the best focal position
  2. Save this X Y ZC as Position Memory 1
  3. Go to the NE corner of the chuck and find the best focal position
  4. Save this X Y ZC as Position Memory 2
  5. Go to the SW corner of the chuck and find the best focal position
  6. Save this X Y ZC as Position Memory 3
  7. Open C:\XferPrint\Data\PositionMemory.txt and copy the contents
  8. Press the Add button in 10Zone Calibration Generator

Updating Calibration

  1. Backup the current calibration files in a .zip
  2. Append the current 1D calibration file with the copied output of the generator
  3. Save the file
  4. Load the new file as the current 1D calibration file
  5. Reset controller and home all stages
  6. Verify that stages are better calibrated

Fine Tuning

The values in the calibration file are found by creating a best fit line. The NW and NE X-Coordinate vs. ZC-Coordinate trendline is used to fit the X axis edges:

Assume stage range of 300X by 400Y

val = b for X = 0

val = (m*300)+b for X = 300

Knowing this, the calibration values can be tweaked to offset the error introduced by the subjective focal plane when saving positions.