SiEPIC EBeam PDK wiki Documentation

Welcome to the SiEPIC_EBeam_PDK wiki!

For users:

• PDK installation in KLayout and Lumerical INTERCONNECT
• Component Library description
• Fabrication via Electron Beam Lithography
• Monte Carlo simulations
• Computational Lithography

For developers:

• Compact model requirements -- how to make new components
• Example on creating layout PCell in KLayout
• Adding components and models to the PDK

SiEPIC-Tools documentation:

• https://github.com/siepic/SiEPIC-Tools/wiki