CSAR AR 6200 13 Anisole (0.15um) - NanoLabStaff/nanolab GitHub Wiki

by NiklasSchwarz ([email protected])

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1. Spin coat AR-P 6200.13 and Anisole in ratio 2:1 (0.15μm)

    7000rpm for 44s
    Ramp: 500rpm/s  
   

2. Soft bake

    150°C for 60s 
   

3. Exposure

    Features: elliptical areas (diameter = 90 to 300 nm)
    HV: 100kV
    Current: 500pA
    Dose: 220μC/cm^2 (Dose factors ranging between 1.46 to 1.49)
   

4. Develop

    AR 600-546 for ~60s
    Bath in IPA for ~30s
    Dry with N2(g)
   

5. Hard bake

    130°C for 60s
   

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Any additional tips and tricks goes here. If you have images showing your results please drag them here.